As the world works to cut back greenhouse gasoline emissions, the worldwide adoption of electrical automobiles (EVs) is driving growing demand for high-performance, energy-efficient compound semiconductors, equivalent to silicon carbide (SiC)-based elements, all through the EV trade. meeting course of.
Renewable power expertise is now on the forefront of local weather analysis, with accelerating electrical automobile gross sales enjoying a much bigger position than ever earlier than. A key problem for the trade: growing the general effectivity of electrical automobiles.
KLA has moved humanity ahead by offering options and assist to the SiC and gallium nitride (GaN) energy gear market that allow developments in EVs and different inexperienced applied sciences. Leveraging our intensive expertise in growing new expertise able to fixing advanced challenges within the IC trade to drive yield enhancements, we’ve developed a complete portfolio of course of gear and inspection and metrology course of management options that specialize for the distinctive wants of energy gear.
Our product portfolio begins with inspection of SiC and GaN wafers, and we are going to share how KLA Instruments™ Candela® The 8520 system is utilized by producers within the energy electronics provide chain to enhance the standard and yield of substrate wafers and optimize their epitaxial development processes.
“The future of renewable energy is here, with a fast-growing market and increased global adoption driving advances in green technology. KLA Instruments™ supports the SiC industry’s efforts to equip EV technology manufacturers with solutions to lead us to a greener, healthier planet.”
James Costello, supervisor, new product introduction, KLA Instruments
Accelerating The Adoption Of Electrical Automobiles By Improved Power Effectivity
Automotive OEMs and Tier 1 suppliers are more and more transferring from Si to SiC energy semiconductors for his or her EV purposes. Small, mild, energy-efficient SiC-based units can deal with excessive temperatures, making them properly fitted to EV purposes. Due to the impression of those applied sciences on automobile efficiency, automakers are more and more utilizing higher-voltage SiC-based techniques to extend power effectivity for his or her EVs, extending cost life and bettering velocity and towing capability. will increase.
Innovating For SiC System Producers
SiC semiconductor system manufacturing has distinctive challenges in comparison with Si semiconductor manufacturing. Defects within the SiC substrate and epitaxial layer happen at a a lot greater density than in Si substrates, making it a significant precedence for producers to detect the defects as this will result in system failure.
Candela from KLA Instruments® The 8520 system is specifically designed for the identification of the SiC substrate and epitaxial defects. The 8520 System’s multi-channel detection helps producers find process-related points and determine and classify yield-decreasing defects, together with triangles, roots, stacking faults, basal airplane dislocations (BPDs), micropipes, scratches and extra.

KLA Instruments’ Inexperienced Mission
The KLA Instruments group develops, markets and providers metrology and defect inspection techniques utilized by massive scale producers (HVM) and analysis and growth departments in universities and industrial laboratories. Our portfolio serves a variety of markets, together with biotech and medical units, optics, shows, batteries and power applied sciences.
“The ability of our tools to benefit research and manufacturing in battery, solar and other green technologies continues to inspire us to innovate across a broad range of green technology applications,” mentioned Tom Pierson, normal supervisor of KLA.
In line with KLA’s ESG commitments and technique, KLA Instruments helps renewable expertise producers striving for a greener future for our planet.
The Candlela® 8520 joins the 8 sequence and Surfscan® SP A2 supplies inspection capabilities for SiC and GaN energy system manufacturing. For extra data on KLA’s full product portfolio for energy units, try our Compound Semi and Substrate Manufacturing net pages and plasma etching processes for SiC and GaN-on-Si energy units from our SPTS division on this attention-grabbing article.
Source: www.kla.com